Product Description
The goal of this book is to bring together into one accessible text the fundamentals of the many disciplines needed by today’s engineer working in the field of microelectromechanical systems (MEMS). The subject matter is wide-ranging: microfabrication, mechanics, heat flow, electronics, noise, and dynamics of systems, with and without feedback. Because it is very difficult to enunciate principles of `good design’ in the abstract, the book is organized arou… More >>
#1 by Bishal Nepal on June 29, 2010 - 3:34 am
This book is a good graduate level MEMS book, but do not think that you will be able to design a MEMS chip after just reading. I bought this one as a part of MEMS Design course at Northeastern University. MEMS students should be familiar with pSpice circuit simulation and Matlab in order to even start thinking of designing MEMS. Microfabrication, the way it is explained here, is very brief, and not very useful.
Rating: 4 / 5
#2 by Mehmet Akgul on June 29, 2010 - 6:28 am
This book is good just for a starter’s guide to MEMS. It just touches a wide range of topics. But if you want to learn the subject with real understanding, then this book can not help you.
Rating: 4 / 5
#3 by Anonymous on June 29, 2010 - 8:51 am
The book tries to cover many different topics at the same time and sometimes makes a quite messy work. However, the book has very good chapters and not so good ones. It provides a good introduction on MEMS fabrication, but a more interested reader will find difficult to fabricate MEMS with the given information. Chapters 5,6,7 and 8 are excellent, but chapters 9, 10,11 and 12 are incomplete and not easily understandable for a Electrical Engineer graduate student. Chapter 13 begins with general equations to be simplified considerably later, giving the impression to the reader that he has learned only a little about fluids. Chapter 11 is quite confusing and chapter 12 lack examples in 2D and 3D lumped models.
Rating: 3 / 5
#4 by Vishesh Vikas on June 29, 2010 - 9:04 am
The book is very well written and discussed both aspects of MEMS – fabrication and design.
Fabrication part is well written and can be clearly understood. I was really impressed with the design part of the book – lumped systems, etc.
Good book for grad students.
Rating: 5 / 5
#5 by Michael A. Duvernois on June 29, 2010 - 11:17 am
A good senior in physics or electrical engineering would be able to use this as either a textbook or a self-study book as an introduction to MEMS. Could you go off and build a new device after reading this book? Probably not, but you could go off and work with a group of more experienced individuals and built a device. This would get you up to speed.
The text’s coverage is somewhat uneven, in places it seems overly detailed, and in others too sparse. However, one of my colleagues (and another reviewer) identified completely different over- and under-coverage sections, so I’m going to consider it to be personal taste as much as anything else.
In short, it’s a good, but not perfect text. It gets five stars though for being the best there is at the moment.
Rating: 5 / 5