Product Description
Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are om… More >>
Lecture Notes on Principles of Plasma Processing
Tags: chemical engineering, collaboration results, derivations, electromagnetics, interdisciplinary field, lecture notes on principles of plasma processing, plasma physics, semiconductors
#1 by Kedar Hardikar on June 26, 2010 - 11:03 am
I found this to be a good book for quick reading. However, you need Lieberman and Lichtenberg (L &L) for a detailed treatment. L & L is of course not a very pleasant reading, so this provides a good break to “keep moving” through the material.
Rating: 3 / 5